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Methylallyltelluride - MATe
Diethyltelluride - DETe
Tantalum(V)-ethoxide - (EtO)5Ta
Pentakis(dimethylamido)tantalum - PDMATa
Tetramethylsilane - TMSi
Tetraethylorthosilicate - TEOS
Silicon tetrachloride - SiCl4
Ditertiarybutylsilane - DTBSi
Bis(tertiarybutylamino)silane - BTBASi
Bis(ethylmethylamino)silane - BEMASi
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