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P – Phosphorous trichloride

Ta – (tert-butylimido)tris(ethylmethylamido)tantalum

Si – Diisopropylaminosilane

Sc – Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)scandium

In – Cyclopentadienylindium

Zr – Tris(dimethylamido)(cyclopentadienyl)zirconium

Zr – Tetrakis(dimethylamido)zirconium

Zr – Tetrakis(ethylmethylamido)zirconium

Sn – Tetrakis(dimethylamino)tin

Sn – Tin tetrachloride

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