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P – Phosphoroustrichloride
Ta – Tris(ethylmethylamido)(tert-buthylimido)tantalum
Si – Diisopropylaminosilane
Sc – Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)scandium(III)
In – Cyclopentadienylindium
W – Bis(tert-butylimino)bis(dimethylamino)wolfram(VI)
Zr – Tris(dimethylamino)(cyclopentadienyl)zirconium
Zr – Tetrakis(dimethylamino)zirconium(IV)
Zr – Tetrakis(ethylmethylamino)zirconium(IV)
Sn – Tetrakis(dimethylamino)tin(IV)
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