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Tris(dimethylamino)silane - TDMASi

Trimethoxypropylsilane - TMOPSi

Diethylzinc - DEZn

Tungstenhexacarbonyl - W(CO)6

Vanadiumtetrachloride - VCl4

Biscyclopentadienylvanadium - Cp2V

Triethoxysilane - HTEOS

Tetrakisdimethylamidotitanium - TDMATi

Titaniumtetraisopropoxide - TTIP

Titaniumtetrachloride - TiCl4

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