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P – Phosphorous trichloride - 7719-12-2
Ta – (tert-butylimido)tris(ethylmethylamido)tantalum - 511292-99-2
Si – Diisopropylaminosilane - 908831-34-5
In – Cyclopentadienylindium
W – Bis(tert-butylimino)bis(dimethylamino)tungsten(VI) - 406462-43-9
Zr – Tris(dimethylamido)(cyclopentadienyl)zirconium - 33271-88-4
Zr – Tetrakis(dimethylamido)zirconium - 19756-04-8
Zr – Tetrakis(ethylmethylamido)zirconium - 175923-04-3
Zn – Dimethylzinc - 544-97-8
Si – Tris(dimethylamino)silane - 15112-89-7
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