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P – Phosphoroustrichloride
Ta – Tris(ethylmethylamido)(tert-buthylimido)tantalum
Si – Diisopropylaminosilane
In – Cyclopentadienylindium
W – Bis(tert-butylimino)bis(dimethylamino)wolfram(VI)
Zr – Tris(dimethylamino)(cyclopentadienyl)zirconium
Zr – Tetrakis(dimethylamino)zirconium(IV)
Zr – Tetrakis(ethylmethylamino)zirconium(IV)
Zn – Dimethylzinc
Si – Tris(dimethylamino)silane
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