Zr

Tetrakis(ethylmethylamido)zirconium

Identification

Acronym:

TEMAZr

CAS-No:

175923-04-3

Application:

Tetrakisethylmethylamidozirconium (TEMAZr) is a solid chemical source suitable for the chemical vapor deposition of Zirconium Oxide

Purity Grade:

EG