Zr
Tetrakis(ethylmethylamido)zirconium
Identification
Acronym:
TEMAZr
CAS-No:
175923-04-3
Application:
Tetrakisethylmethylamidozirconium (TEMAZr) is a solid chemical source suitable for the chemical vapor deposition of Zirconium Oxide
Purity Grade:
EG