Ta
Tantalum(V)-ethoxide
Identification
Acronym:
TaEtO
CAS-No:
6074-84-6
Application:
TaN CVD and ALD
Purity Grade:
EG
Ta
Tantalum(V)-ethoxide
Acronym:
TaEtO
CAS-No:
6074-84-6
Application:
TaN CVD and ALD
Purity Grade:
EG
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