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Silicon tetrachloride - SiCl4
Ditertiarybutylsilane - DTBSi
Bis(tertiarybutylamino)silane - BTBASi
Bis(ethylmethylamino)silane - BEMASi
Bis(diethylamino)silane - BDEASi
Tetramethylgermane - TMGe
Isobutylgermane - IBGe
Germaniumtetrachloride - GeCl4
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