Zr

Tetrakis(dimethylamido)zirconium

Identification

Acronym:

TDMAZr

CAS-No:

19756-04-8

Application:

Tetrakisdimethylamidozirconium (TDMAZr) is a solid chemical source suitable for the chemical vapor deposition of Zirconium Oxide.

Purity Grade:

EG

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