Si
Trichlorosilane
Identification
Acronym:
TCS
CAS-No:
10025-78-2
Application:
CVD Precursors for SiC
Purity Grade:
EG
Si
Trichlorosilane
Acronym:
TCS
CAS-No:
10025-78-2
Application:
CVD Precursors for SiC
Purity Grade:
EG
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