C
Tertiarybutylchloride
Identification
Acronym:
TBCl
CAS-No:
507-20-0
Application:
Chlorine source as mild and selective etchant for CVD chamber cleaning and selective area deposition
Purity Grade:
EG
C
Tertiarybutylchloride
Acronym:
TBCl
CAS-No:
507-20-0
Application:
Chlorine source as mild and selective etchant for CVD chamber cleaning and selective area deposition
Purity Grade:
EG