Ta
(Tert-butylimido)tris(ethylmethylamido)tantalum
Identification
Acronym:
TBTEMATa
CAS-No:
511292-99-2
Application:
ALD and CVD precursor
Purity Grade:
EG, DG
Ta
(Tert-butylimido)tris(ethylmethylamido)tantalum
Acronym:
TBTEMATa
CAS-No:
511292-99-2
Application:
ALD and CVD precursor
Purity Grade:
EG, DG