Ta
Pentakis(dimethylamido)tantalum
Identification
Acronym:
PDMATa
CAS-No:
19824-59-0
Application:
TaN CVD and ALD
Purity Grade:
EG
Ta
Pentakis(dimethylamido)tantalum
Acronym:
PDMATa
CAS-No:
19824-59-0
Application:
TaN CVD and ALD
Purity Grade:
EG