Si
Tetraethylorthosilicate
Identification
Acronym:
TEOS
CAS-No:
78-10-4
Application:
Si precursor for SiO2 deposition
Purity Grade:
EG, PG
Si
Tetraethylorthosilicate
Acronym:
TEOS
CAS-No:
78-10-4
Application:
Si precursor for SiO2 deposition
Purity Grade:
EG, PG
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