Si
Hexachlorodisilane
Identification
Acronym:
HCDSi
CAS-No:
13465-77-5
Application:
Silicon precursor for CVD applications
Purity Grade:
EG
Si
Hexachlorodisilane
Acronym:
HCDSi
CAS-No:
13465-77-5
Application:
Silicon precursor for CVD applications
Purity Grade:
EG