Si
Bis(tertiarybutylamino)silane
Identification
Acronym:
BTBASi
CAS-No:
186598-40-3
Application:
ALD and CVD precursor
Purity Grade:
EG
Si
Bis(tertiarybutylamino)silane
Acronym:
BTBASi
CAS-No:
186598-40-3
Application:
ALD and CVD precursor
Purity Grade:
EG