Si
Bis(diethylamino)silane
Identification
Acronym:
BDEASi
CAS-No:
27804-64-4
Application:
ALD and CVD precursor
Purity Grade:
EG
Si
Bis(diethylamino)silane
Acronym:
BDEASi
CAS-No:
27804-64-4
Application:
ALD and CVD precursor
Purity Grade:
EG
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