Ru
Bis(ethylcyclopentadienyl)ruthenium
Identification
Acronym:
(EtCp)2Ru
CAS-No:
32992-96-4
Application:
ALD, CVD, III/V DOPANT
Purity Grade:
EG
Ru
Bis(ethylcyclopentadienyl)ruthenium
Acronym:
(EtCp)2Ru
CAS-No:
32992-96-4
Application:
ALD, CVD, III/V DOPANT
Purity Grade:
EG