Hf
Tetrakis(ethylmethylamido)hafnium
Identification
Acronym:
TEMAHf
CAS-No:
352535-01-4
Application:
Hafnium precursor for CVD and ALD processes
Purity Grade:
EG
Hf
Tetrakis(ethylmethylamido)hafnium
Acronym:
TEMAHf
CAS-No:
352535-01-4
Application:
Hafnium precursor for CVD and ALD processes
Purity Grade:
EG