Hf

Tetrakis(dimethylamido)hafnium

Identification

Acronym:

TDMAHf

CAS-No:

19782-68-4

Application:

Tetrakisdimethylamidohafnium (TDMAHf) is a solid chemical source suitable for the chemical vapor deposition of Hafnium Oxide layers.

Purity Grade:

EG

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