Y

Bis(ethylcyclopentadienyl)(ditertbutyltriazenido)yttrium

Identification

Acronym:

(EtCp)2Y(dbt)

CAS-No:

3037068-73-5

Application:

ALD deposition of Y2O3; Y doping of HfO2, hydrophobic coating

Purity Grade:

DG

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