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P – Phosphoroustrichloride

Ta – Tris(ethylmethylamido)(tert-buthylimido)tantalum

Si – Diisopropylaminosilane

Sc – Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)scandium(III)

In – Cyclopentadienylindium

W – Bis(tert-butylimino)bis(dimethylamino)wolfram(VI)

Zr – Tris(dimethylamino)(cyclopentadienyl)zirconium

Zr – Tetrakis(dimethylamino)zirconium(IV)

Zr – Tetrakis(ethylmethylamino)zirconium(IV)

Sn – Tetrakis(dimethylamino)tin(IV)

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