Ta
(tert-butylimido)tris(diethylamido)tantalum
Identification
Acronym:
TBTDEATa
CAS-No:
169896-41-7
Application:
ALD and CVD precursor
Purity Grade:
DG
Ta
(tert-butylimido)tris(diethylamido)tantalum
Acronym:
TBTDEATa
CAS-No:
169896-41-7
Application:
ALD and CVD precursor
Purity Grade:
DG
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