Si
Tris(dimethylamido)silane
Identification
Acronym:
3DMASi
CAS-No:
15112-89-7
Application:
ALD, CVD, IV EPI
Purity Grade:
EG
Si
Tris(dimethylamido)silane
Acronym:
3DMASi
CAS-No:
15112-89-7
Application:
ALD, CVD, IV EPI
Purity Grade:
EG
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