High Performance Process Chemicals for CVD Applications

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CVD-Sources Overview

By DockChemicals

Chemicals for CVD Applications
Precisely designed to your process

The DOCK/CHEMICALS Solutions include a wide range of process chemicals for CVD applications. Please find an extraction below. If you’re looking for a special solution, don’t hesitate to contact us.

CVD-Sources
Chromium (Cr)
CP2Cr
Bis(cyclopentadienyl)chromium
Hafnium (Hf)
TDEAHf
Tetrakis(diethylamino)hafnium
Manganese (Mn)
MCP2Mn
Bis(methylcyclopentadienyl)manganese
Silicon (Si)
TDMAS
Tetrakis(dimethylamino)silane

Tantalum (Ta)
TBTDET
(Tert-butylimino)tris(diethylamino)tantalum

Titanium (Ti)
TDMAT
Tetrakis(dimethylamino)titanium

Tungsten (W)
BTBMW
Bis(tert-butylimido)bis(dimethylamido)tungsten

Zirconium (Zr)
TDEAZ
Tetrakis(diethylamino)zirconium