High Performance Process Chemicals for CVD Applications

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R & D

Continuous research for the next generation of high performance chemicals

Continuous MO-V focus:

Following our mission of a metalorganic group-V supply, DOCK/CHEMICALS focuses not only on As and P compounds but also on N, Sb and Bi.

DOCK/CHEMICALS has been the frontier on metalorganic nitrogen compounds, such as unsymmetric dimethylhydrazine (UDMHy) and tertiary butyl hydrazine (TBHy). Those better decomposing molecules have their application already in novel metastable compounds. However, DOCK/CHEMICALS is continously  striving to improve the purity of these precursors.

Antimonide containing semiconductors become more and more attractive not only from a scientific point of view, but also in the application. DOCK/CHEMICALS offers a wide range of antimonide precursors and includes the portfolio currently in the epigrade quality control program to further improve the purity levels of these precursors.

Bi containing III/V structures are currently under investigation as they promise unique band alignment features. DOCK/CHEMICALS is supporting these activities by developing ultra pure Bi precursors for these scientific projects.

Please contact us for more details.

Liquid Indium Precursors

The III/V industry is suffering from difficulties with the standard indium precursor trimethylindium (TMIn), as it is solid at room temperature. The solid nature requires handling and filling in of glove boxes which sets the purity limit for oxygen at about 1ppm (a problem high for demanding III/V devices.  Furthermore the solid state causes instabilities in vapor delivery to the growth chamber. DOCK/CHEMICALS has developed novel liquid indium precursors, which greatly overcome the bottlenecks of the standard precursor.

Please contact us for more details.

Liquid Magnesium Precursor

In our all-liquid approach we also work on liquid magnesium compounds to support the growing GaN-based LED market. This research project has just recently started and we look forward to disclosing details during the remainder of 2012.

Bulk Distribution System

DOCK/CHEMICALS is working on a new concept for efficient and cost-effective precursor supply to MOCVD equipment. Together with our equipment partner Sempa Systems GmbH and the Philipps University of Marburg we are finalizing our design.

Please contact us for more details.

EPIGRADE™

Following our MOCVD platform strategy, DOCK/CHEMICALS is including a larger portfolio of chemicals into the epigrade-quality program, offering unsurpassed purity standards for a wider range of precursors. Precursors to follow in 2012 are, among others, TMSb, TESb, CBr4, CCl3Br.

Please contact us for more details.

EPIGRADE™ AC

During the course of 2012, DOCK/CHEMICALS will be able to further tighten the oxygen spec for TBAs and TBP, offering a new grade EPIGRADE™ AC (aluminum certified) for ultra low oxygen levels in high aluminum containing material systems.

Please contact us for more details.

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