High Performance Process Chemicals for CVD Applications

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Ultra pure process chemicals with the highest quality

Dockweiler Chemicals “DC” manufactures and distributes process chemicals for MOCVD applications.

Depending on application the following quality grades have been specified:

EG

Electronic Grade

ICP-OES based analytical determination of metal impurities

EPIGRADE™

Batch to batch MOCVD-growth and characterization of reference material systems

Characterization

• Van der Pauw Hall-measurements at 300 K and 77 K;

Photoluminescence (PL) at 300 K

• Calibrated SIMS for oxygen;

(SIMS-investigations by RTG Mikroanalyse GmbH, Berlin, Germany)

EPIGRADE™AC – Aluminium certified – available in ’12

See specification of EPIGRADE™

Guaranteed minimum level of Oxygen in MOCVD grown Aluminium containing material systems

• Van der Pauw Hall-measurements at 300 K and 77 K;

• Photoluminescence (PL) at 300 K

• Calibrated SIMS for oxygen;

(SIMS-investigations by RTG Mikroanalyse GmbH, Berlin, Germany)

Provided reports

CoA – Certificate of Analysis

Batch report, including PL-plot, calibrated [O]-SIMS-profile

For more information please contact us: info@dockchemicals.com