High Performance Process Chemicals for CVD Applications

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NEW* Dock/Chemical Liquid Carbon Doping Source CCl3Br

Following the DOCK/CHEMICALS philosophy we have developed a novel liquid carbon doping source Carbontrichloridebromide (CCl3Br) as replacement for solid Carbontetrabromide (CBr4). Field results are extremely positive with the novel precursor. Doping efficiency is equal to CBr4, but the stability of vapor supply exhibits great advantages due to the liquid state. Please contact a DOCK/CHEMICALS representative for further information.