High Performance Process Chemicals for CVD Applications

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III/V on Si – Dock/Chemicals step ahead!

DOCK/CHEMICALS’ MO-V enable III/V on Si. Much progress is made on the development of this novel technology. The international roadmap for Si industry foresees the integration of compound semiconductor as channel material in Si CMOS logic device fabrication within the next years. Researchers globally benefit from the safety and performance advantages of DOCK/CHEMICALS’ group-V precursors and accelerate the development.